【MMT MFG - FACILITIES OPS/MAINT Department】
Facilities include Water, Gas & Chemical, Electrical, Mechanical, System Integration, Maintenance and Instrument & Control Sections. Our major task is to support the utilities requirement for each wafer product Areas(Such as PHOTO, Dry ETCH…etc).
Water team include UPW/PCW supply, recycle system even wastewater treatment. Gas supply system have Bulk gas such as N2, O2, Ar…etc and special gas including Corrosive, Flammable and Inert. Chemical team supply the chemical demand from tools, which use pump or compressed N2 to supply for request Areas. Mechanical team(HVAC team) not only controls the temperature/humidity/exhaust in FAB, but also supply CDA, Natural gas. As for Electrical, emergency power and DUPS/SMS system can sustain our continuous supply for tools.
Above is our 4 major utilities supply system. System integration section does the tool hook up work between facilities system and tools. Maintenance section provides our daily requirements such as water dispenser, elevator even firefighting system. In the end, our I&C team not only focus on PLC control but also use AI concept & customize plate form development to achieve early detection for a better quality management and productivity improvement.